(N|LEKTRONOLITOGRAFIQs - (NwASI^EW(B,(Nb(B. (Nn(B.s (NbORIS nIKITOWI^s ((Nm(B.s (NzNANIEs, 1982)
Keywords: (NfOTOLITOGRAFIQs; (NmIKRO\LEKTRONNYE SHEMY INTEGRALXNYEs -- (NpROIZWODSTWOs